All plastic model. Fluorine contained resin (PFA) body is injection molded.
All parts made of fluorine contained resin. O-rings in particular are FEP-coated fluoro-rubber with excellent chemical resistance and no rubber elution.
Unique new techniques such as “injection molding”, “tube connect system” and “nut type plug mount design” are used to prevent the generation of particles, incessant headache for semiconductor parts manufacturers.
To connect with a plug, just push the socket on to it. Disconnection is done in simple and one-handed button operation.
Unique “double-lock mechanism” prevents accidental disconnection of socket and plug.
Branched tube port improves operability and reduces required piping space.